Integrated circuit stack including a patterned array of electrically conductive pillars

ABSTRACT

The present disclosure describes a stacked integrated circuit system that includes two integrated circuit layers stacked on opposite sides of an interposer layer. The interposer layer may include at least one integrated circuit die and an interposer portion that includes a plurality of electrically conductive pillars arranged in a laterally patterned array within the interposer layer.

This application is a continuation of pending U.S. application Ser. No.14/692,154, filed on Apr. 21, 2015, entitled INTEGRATED CIRCUIT STACKINCLUDING A PATTERNED ARRAY OF ELECTRICALLY CONDUCTIVE PILLARS, theentire contents of which are hereby incorporated by reference in itsentirety.

TECHNICAL FIELD

The disclosure relates to stacked integrated circuit systems includingan integrated circuit die.

BACKGROUND

In some examples, integrated circuit components may be verticallystacked to save space. In some examples, the stacked integrated circuitcomponents may be packaged in a single package and electrically coupledto a printed board.

SUMMARY

In general, the present disclosure describes a stacked integratedcircuit system that includes two integrated circuit layers stacked onopposite sides of the interposer layer. The interposer layer may includeone or more integrated circuit die (e.g., one or moreapplication-specific integrated circuit die) and an interposer portionthat includes a plurality of electrically conductive pillars arranged ina patterned array laterally within the interposer layer. Eachelectrically conductive pillar of the plurality of electricallyconductive pillars is oriented so the pillar extends through theinterposer layer and contacts the two integrated circuit layers stackedon opposite sides of the interposer layer. In some examples, the twointegrated circuit layers have a plurality of interconnect elementsconfigured to create at least one electrical pathway that transmitsthrough the interposer layer using at least one of the plurality ofelectrically conductive pillars and electrically connects the twointegrated circuit layers. Each pillar in the plurality of electricallyconductive pillars may also be substantially encircled laterally withinthe interposer layer by a filler material that physically isolates eachrespective electrically conductive pillar from the rest of the pluralityof electrically conductive pillars.

In some examples, at least one integrated circuit die may beelectrically coupled to one of the integrated circuit layers throughinterconnect elements, e.g., electrically conductive traces,electrically conductive vias, or both, of the adjacent integratedcircuit layer. At least one integrated circuit die may also beelectrically connected to other integrated circuit layers of the stackedintegrated circuit system using the plurality of electrically conductivepillars in the interposer portion.

In some examples, the disclosure describes a system including a firstintegrated circuit layer comprising a first plurality of interconnectelements; a second integrated circuit layer comprising a secondplurality of interconnect elements; and an interposer layer between thefirst and second integrated circuit layers. The first and secondintegrated circuit layers and the interposer layer may be stacked in thez-axis direction. The interposer layer may include an interposer portionincluding a filler material and a plurality of electrically conductivepillars extending in the z-axis direction. The plurality of electricallyconductive pillars may form a patterned array in an x-y planesubstantially normal to the z-axis direction. In some examples, eachelectrically conductive pillar of the plurality of electricallyconductive pillars is substantially encircled in the x-y plane by thefiller material, at least one electrically conductive pillar of theplurality of electrically conductive pillars is configured toelectrically communicate with at least one interconnect element of thefirst plurality of interconnect elements and at least one interconnectelement of the second plurality of interconnect elements. The interposerlayer also may include a first integrated circuit die adjacent to theinterposer portion and between the first and second integrated circuitlayers.

In some examples, the disclosure describes a method including mounting afirst integrated circuit die on a top surface of a first integratedcircuit layer. The first integrated circuit die and first integratedcircuit layer may be stacked in a z-axis direction, and the firstintegrated circuit may electrically communicate with the firstintegrated circuit layer. The method may also include forming aninterposer portion on an exposed part of the top surface of the firstintegrated circuit layer, adjacent to the first integrated circuit die.The interposer portion may include a plurality of electricallyconductive pillars that extend in the z-axis direction and form apatterned array in an x-y plane substantially normal to the z-axisdirection. Each electrically conductive pillar of the plurality ofelectrically conductive pillars may be substantially encircled in thex-y plane by a filler material. At least one of the plurality ofelectrically conductive pillars may be configured to electricallycommunicate with the first integrated circuit layer. In some examples,the method may also include stacking a second integrated circuit layeron the interposer portion, where the first and second integrated circuitlayers are substantially parallel to each other and the first integratedcircuit is between the first and second integrated circuit layers.

The details of additional examples are set forth in the accompanyingdrawings and the descriptions below. Other features, objects, andadvantages of the disclosure will be apparent from the description anddrawings, and from the claims.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional conceptual and schematic diagramillustrating a stacked integrated circuit system that includes twovertically-stacked integrated circuit layers and an interposer layer.

FIG. 2A is a top view conceptual and schematic diagram illustrating aninterposer layer showing two integrated circuit dice substantiallyencircled by an interposer portion.

FIG. 2B is an enlarged view of a portion of FIG. 2A showing a gapdistance between adjacent electrically conductive pillars.

FIG. 3 is a flow diagram illustrating an example technique for forming astacked integrated circuit system.

DETAILED DESCRIPTION

Stacked arrangements of integrated circuits (IC) have becomeincreasingly useful in terms of reducing space consumption and embeddingor encapsulating IC die to protect the IC die and deter reverseengineering of the IC die. The present disclosure describes a stacked ICsystem that includes an interposer layer positioned between a first andsecond IC layers. The interposer layer may include at least one IC dieand an interposer portion that includes a plurality of electricallyconductive pillars arranged in a patterned array throughout theinterposer portion. In some examples, the interposer portionsubstantially surrounds the IC die, thereby, in combination with thefirst and second IC layers, substantially encapsulating the ID diewithin the stacked IC system.

Encapsulating one or more IC die within the stack may help protect theIC die from tampering. For example, in examples in which the IC dieincludes proprietary or sensitive information or configurations,encapsulating the IC die within the stacked IC system may provideincreased security and prevent or reduce the risk of reverse engineeringof the IC die. The surrounding IC layers and interposer portion mayhinder physical access to the IC die. In addition, criticalinterconnects between an IC die and the other IC layers, IC dice, andinterposer layer may also be secured within the inner layers of thestacked IC system, which may further inhibit access to information thatmay be useful for reverse engineering the stacked IC system. Forexample, an adversary may have more difficulty sampling the powerconsumption of an IC die when the electrical interconnects between an ICdie and other components (e.g., an off-chip memory provided by anotherIC die of the system) are secured within the inner layers of the stackedIC system and not exposed. Power consumption may be one parameter usedby an adversary to gain information about the stacked IC system in atype of attack referred to as a side channel attack.

The stacked IC systems described in the disclosure may also provideother advantages. For example, the patterned array of electricallyconductive pillars may provide added reliability benefits compared toalternative stacked arrangements of IC systems. For example, mechanicalstress generated by thermal expansion and coefficient of thermalexpansion (CTE) mismatches between materials or adjacent layers can leadto physical deformation and cause premature failure. In some examples,forming a patterned array of electrically conductive pillars throughoutthe interposer layer may reduce mechanical stresses in the IC systemresulting from CTE mismatches. In some examples, the presence of theplurality of electrically conductive pillars may assist in dissipatingheat within the stack IC system.

In some examples, the plurality of electrically conductive pillars mayincrease the reliability of the system. For example, reliabilitybenefits may be achieved by implementing redundant electricalconnections using the plurality of electrically conductive pillars toimprove yield. The IC system may be configured to permit a certaindegree of faults while still maintaining normal operations. In someexamples, the redundant electrical connections using the plurality ofelectrically conductive pillars may be used to monitor the IC system todetermine if physical damage or other faults have occurred.

In some examples of the disclosure, each pillar of the plurality ofelectrically conductive pillars is substantially encircled within theinterposer layer by a filler material that can be electricallyconductive or electrically non-conductive. The electricallynon-conductive filler material may be used to electrically isolatepillars in the plurality of electrically conductive pillars from oneanother and provide structural support for the interposer portion. Theconductive filler material may be used in some examples to createelectrical networks, e.g., electrical webs, within the interposer layer.The electrical webs may be beneficial to encircle and electricallyshield components within the interposer layer.

The stacked IC systems described herein may facilitate incorporation ofIC die that otherwise may not be used in stacked IC assemblies becausethe IC die do not include through-vias, e.g., third party oroff-the-shelf IC components. In this way, the stacked IC systemsdescribed herein may facilitate manufacturing of moreapplication-specific assemblies because, in some examples, an IC die maybe incorporated into the IC systems without requiring substantial or anyreconfiguration or customization of the configuration of the IC die(e.g., the addition of certain types of electrical interconnects, suchas through-vias). In some examples, an IC die of the stacked IC systemmay be electrically coupled (e.g., via one or more electrical contacts)to an adjacent IC layer, which may be electrically connected to theinterposer portion via respective electrically conductive vias andtraces in the adjacent IC layer.

FIG. 1 is a cross-sectional conceptual and schematic diagram of anexample stacked IC system 10 that includes vertically-stacked IC layers12 and 16 separated by an interposer layer 14. IC layers 12 and 16 andinterposer layer 14 are stacked, e.g., arranged, in the z-axisdirection, (orthogonal x-y-z axes are shown in FIG. 1 and in the otherfigures merely for ease of description), such that IC layers 12 and 16and the interposer layer are substantially planar, with each of layers12, 14, and 16 forming a separate plane. As used in the disclosure, alayer may define a substantially planar surface (e.g., planar or nearlyplanar but for processing variations) in some examples. In the exampleshown in FIG. 1, each of layers 12, 14, and 16 are shown as having thesame dimensions and configurations (e.g., shape). In other examples,however, one or more of layers 12, 14, and 16 may have a different sizeor shape than at least one other of layers 12, 14, and 16, such that thelayers 12, 14, and 16 are stacked, but at least two layers of layers 12,14, and 16 are partially offset from each other due to the differentconfigurations or dimensions.

In the example illustrated in FIG. 1, interposer layer 14 includes aninterposer portion 20 and IC die 28. In some examples, interposerportion 20 may substantially encircle (e.g., completely or nearlycompletely surrounds in a cross-section taken along an x-y planeorthogonal to the z-axis) IC die 28. In this way, IC layer 12,interposer portion 20, and IC layer 14 may completely encapsulate IC die28 within stacked IC system 10, thereby preventing outside access to ICdie 28. In some examples, IC die 28 may not visibly exposed (to thehuman eye) such that an intruder cannot visually ascertain where IC die28 is located within IC system 10, what type of IC die 28 is included inthe system 10, or the configuration of the electrical connections of ICdie 28 without further physical tampering with system 10 to expose ICdie 28. In some examples, encapsulating IC die 28 within the stacked ICsystem 10 may help reduce or even prevent interception of electricalsignals (during a tamper event) transmitted by IC die 28 within stackedIC system 10, which could provide insight into the components andcapabilities of system, e.g., to a reverse engineering.

IC layers 12 and 16 may include a plurality of interconnect elements.Interconnect elements of IC layers 12 and/or 16 may include, forexample, vias 40, through-vias 32, traces 34, electrical contacts 38 and42, passive circuit elements (e.g., passive resistors, inductors, andcapacitors), active circuit elements, metal layers, logic circuits, orother conductive elements positioned within IC layers 12 and/or 16. Theplurality of interconnect elements, e.g., vias 32 and 40, traces 34,electrical contacts 38 and 42, and the like, may be defined by anysuitable electrically conductive material which facilitates electricalcommunication, such as tungsten, molybdenum, copper, aluminum, silver,or gold.

As described herein, the interconnect element form electricallyconductive pathways, e.g., vias 32, 40, and traces 34 extending withinthe respective IC layers 12 and 16. Vias 32 and 40 and traces 34 areconfigured to transmit electrical signals within the respective IClayers 12 and 16. As shown in FIG. 1, vias 32 and 40 are configured toroute signals in a direction generally in the z-axis direction, andelectrically conductive traces 34 are configured to route electricalsignals in other directions, such as in directions generally parallel tothe x-y plane. Vias 32 are illustrated as through-vias, configured totransmit electrical signals between the interposer layer 14 and other IClayers (not shown in figure) adjacent to either IC layer 12 or 16.

As described herein, IC layers 12 and 16 include interconnect elements(e.g., vias 32, 40 and traces 34) configured to transmit electricalsignals through system 10 in order to provide electrical communicationbetween interposer portion 20 and IC layers 12 and 16 and electricalcommunication with IC die 28. Although the examples illustrated hereinportray IC layers 12 and 16 as including through-vias 32 extendingsubstantially through the respective IC layers, in some examples, IClayers 12 and/or 16 may not include through-vias 32. Instead, IC layers12 and 16 may include other interconnect elements configured totransmit, condition, and/or process electrical signals within therespective IC layer 12 or 16, and to provide communication with IC die28.

In some examples, IC die 28 may be connected to IC layers 12 and 16using the plurality of interconnect elements (e.g. contact pads 38, vias32, 40, traces 34, and the like) within the IC layers 12, 16 and usingthe plurality of electrically conductive pillars 22 of the interposerportion 20. In the example shown, IC die 28 includes electrical contacts36 positioned on a surface and configured to be electrically coupled toelectrical contacts 38 positioned on a surface of IC layer 16. (In FIG.1, only some of electrical contacts 36 and 38 are denoted, for clarityof illustration.) The adjacent electrical contacts 36 and 38 of ICsystem 10 may be coupled to one another using any suitable techniquesuch as, for example, connecting electrical contacts viaflip-chip-bonding, direct metal bonding, thermal compression bonding, oran oxide bonding technique.

In some examples, at least some of electrical contacts 38 of IC layer 16are electrically coupled to electrically conductive vias 40 (illustratedby hidden lines in FIG. 1), which are electrically coupled to respectiveelectrically conductive traces 34. Electrically conductive traces 34each electrically connect electrically conductive vias 40 tothrough-vias 32, which electrically connect to communicate with theplurality of electrically conductive pillars 22 of interposer portion 20through respective electrical contacts 42. Electrically conductivepillars 22 may also be connected to vias 32 and traces 34 of IC layer 12through respective electrical contacts 42. In such a configuration, ICdie 28 is able to electrically communicate with both IC layers 12 and 16through the electrically conductive pillars 22 of interposer portion 20.

Through vias 32 may provide front-side to back-side connections for IClayers 12 and 16, respectively. For example, as illustrated in FIG. 1,the through-vias 32 located in IC layers 12 and 16 connect to theplurality of electrically conductive pillars 22 through electricalcontacts 42 located along the surfaces of IC layers 12 and 16 at theirrespective interface with interposer portion 20. The electrical contacts42 are positioned to align with the plurality of electrically conductivepillars 22.

In some examples, although not shown in FIG. 1, a surface of the IC die28 adjacent to IC layer 12 may also include electrical contacts or pads,in addition to or as an alternative to IC die 28 adjacent to IC layer 16including electrical contacts 36. In some of these examples, traces 34and vias 32 within IC layer 12, may facilitate electrical connection andcommunication between the top surface of the IC die 28 and other partsor layers of stacked IC system 10 (e.g., sending electrical signalsthrough the plurality of electrically conductive pillars 22). In thisway, IC die 28 may include input and output for electrical signals onmultiple sides of the die while not requiring vias extendingsubstantially therethrough. In some examples, the plurality ofelectrically conductive pillars 22 of interposer portion 20 providemeans for electrical communication between IC die 28 and IC layer 12that may ordinarily be provided by through-vias of IC die 28. Thus,while IC die 28 may include through-vias, they are not necessary to beincorporated into the z-axis stacked configuration of system 10.

In some examples, IC layers 12 and 16 may be custom IC layers, e.g.,custom semiconductor devices. For example, IC layer 12 and IC layer 16may be selected or formed to have a particular function based on theapplication for which IC system 10 is intended. In some examples, IClayer 12 and/or IC layer 16 may be formed with particular thermalproperties such that the layers may help dissipate heat generated bycomponents of IC system 10, such as IC die 28. As another example, IClayer 12 and/or IC layer 16 may be configured to also help shield IC die28 from EMI (e.g., radio frequency interference) or provide tamperresistant features. As yet another example, IC layer 12 and/or IC layer16 may include one or more termination resistors that may reflectelectrical signals that may cause interference.

Although several examples are described, IC layers 12 and 16 may beformed with any properties suitable for the particular application forwhich IC system 10 is intended. For example, in some examples, IC layers12 and 16 may include an analog interposer chip, amicroelectromechanical system (MEMS), an inertial sensor, a magneticsensor, an electro-magnetic sensor, a chemical sensor, a biologicalsensor, an acoustic sensor, an optical sensor, a radiation sensor, aradio-frequency (RF) link, a power resource, dynamic random accessmemory (DRAM), a field programmable gate array (FPGA), a parallelcomputing resource, or any combination thereof.

IC layers 12 and 16, including electrically conductive vias 32, 40 andtraces 34 extending therethrough and within, may be formed using anysuitable technique. For example, IC layers 12 and 16 may be formed usingany suitable semiconductor processing technique. The semiconductorprocessing may be used to define the electrically conductive vias 32, 40and electrically conductive traces 34 in IC layers 12 and 16 within asemiconductor material (e.g., silicon). In addition, in examples inwhich IC layers 12 and 16 include semiconductor components, such astransistors in a semiconductor, the components may be formed using thesemiconductor processing techniques (e.g., as part of front-end-of-line(FEOL) processing).

In some examples, vias 32, 40 and traces 34 are formed as part of theback end-of-line (BEOL) processing part of an IC fabrication step. Forexample, a plurality of metal layers may be deposited onto a substrate(e.g., an active semiconductor layer) using planar copper dual damasceneinterconnect technology, tungsten polished local interconnecttechnology, or planarized subtractive aluminum interconnect technology,or some combination of these techniques.

In some examples, passive elements configured to condition electricalsignals within the stack may be positioned within one or both of IClayers 12 and 16 during fabrication. For example, one or both of IClayers 12 and 16 may be formed to include one or more passive resistors,inductors, capacitors, or any combination thereof, which are configuredto manipulate signals such that the signals are satisfactory for asubsequent stage of processing. As an example, resistive elements withinone or both IC layers 12 and 16 may be used to pull unused logic circuitinputs to particular states and to achieve particular impedance effects.

In some examples, IC die 28 may be mechanically coupled to IC layer 12via an adhesive bond 50 positioned on a surface of the IC die 28opposite the electrical contacts 36. Adhesive bond 50 may be, forexample, positioned on a semiconductor substrate side of IC die 28 inexamples in which IC die 28 is fabricated from a semiconductor wafer.Adhesive bond 50 may comprise any suitable adhesive material configuredto mechanically couple IC die 28 to one or more adjacent layers insystem 10. For example, adhesive bond 50 may comprise an SU-8 adhesive,a benzocyclobutene adhesive, or another adhesive that utilizesfree-radical, non-condensation-based organic reactions (e.g., anadhesive that does not include ions, water, alcohols, or corrosives).Adhesive bond 50 may be applied to IC die 28 using any suitable adhesivebonding technique. Although an adhesive bond 50 is described herein, inother examples, system 10 may include another type of wafer bond tomechanically couple IC die 28 to adjacent layers of system 10. Forexample, in some examples, thermal compression bonding (e.g.,copper-to-copper thermal compression bonding, eutectic alloy bonding, oroxide bonding) may be utilized to mechanically couple IC die 28 toadjacent layers in system 10.

In some examples, a plurality of IC die 28 may be incorporated into theinterposer layer 14 and positioned in a common plane, such as thearrangement of IC dice 28A and 28B shown in FIG. 2A. In the exampleillustrated in FIG. 2A, IC dice 28A and 28B are not adjacent or alignedwithin an interposer layer 58. In other examples, the plurality of ICdice 28A, 28B may be positioned adjacent or aligned with one another ininterposer layer 58.

In some examples, IC die 28 may be configured for various signalprocessing tasks, which may be specific to the application for which ICsystem 10 is used. Accordingly, the type of IC die 28 included in system10 may vary depending on the intended application. For example, IC die28 may include one or more die configured for one or more of processing(e.g., co-processor or microprocessor die), memory (e.g., random accessmemory (RAM) or non-volatile memory (NVM)), power conditioning, ambientmonitoring (e.g., temperature and/or health monitoring), sensing,encryption, optics-photonics, or non-volatile memory. As additionalexamples, IC die 28 may include radio-frequency IC devices,radiation-hardened devices, microelectromechanical systems (MEMS), orany combination thereof.

In some examples, IC die 28 may include an IC die that is not inherentlyconfigured for vertical stacking, e.g., that do not include through-viasextending completely through the thickness of the die (measured in thez-axis direction in the example shown in FIG. 1). In this way, the ICdie 28 need not be custom made to be incorporated into system 10 and,instead, may be third party IC die and selectively incorporated based ona particular application for which system 10 is intended.

In some examples, IC die 28 may be processed to be substantially planar(e.g., planar or nearly planar), which may facilitate formation of asubstantially planar interposer layer 14 to assist in stacking of IClayer 16. In some examples, a third party IC die may be procured inwafer form and subsequently processed for incorporation into IC system10.

As shown in FIG. 1, interposer layer 14 includes a plurality ofelectrically conductive pillars 22 within interposer portion 20. Theplurality of electrically conductive pillars 22 are oriented such thatthe longitudinal axis of each pillar of electrically conductive pillars22 is substantially parallel (e.g., parallel or nearly parallel) to thez-axis direction in FIG. 1. Each electrically conductive pillar ofelectrically conductive pillars 22 extends substantially through thethickness of interposer layer 14 in the z-axis direction, forming partof an upper and lower surface of interposer portion 20. In someexamples, at least some electrically conductive pillars of the pluralityof electrically conductive pillars 22 may contact and electricallycommunicate with one or both of IC layers 12 and 16. In this way, atleast some electrically conductive pillars of the plurality ofelectrically conductive pillars 22 may transmit electrical signalsbetween IC layers 12 and 16 through interposer layer 14, therebyproviding some interconnection circuitry for system 10.

The lateral cross-section of the plurality of electrically conductivepillars 22 (i.e., the cross-section in a plane parallel to the x-y planein FIG. 1) can be of any useful shape including, for example, square,rectangular, circular, elliptical, hexagonal, or the like. The lateralcross-sectional dimension (e.g., width, approximate width, diameter, orapproximate diameter) of the electrically conductive pillars 22 may besufficiently large to help reduce mechanical stress within theinterposer portion 20 associated with thermal expansion or CTE mismatch.In some examples electrically conductive pillars 22 may have across-sectional dimension of about 30 μm.

Electrically conductive pillars 22 may be arranged in a patterned arrayin the x-y plane of FIG. 1. The patterned array can include any usefularrangement. In some examples, the patterned array may include with asubstantially consistent and repeating pattern extending in the x-yplane. For example, in the patterned array may be in the form of a grid(e.g., square or rectangular), hexagonal arrangement, octagonal-squarearrangement, or the like. By way of example, FIGS. 2A and 2B show a gridarray that includes a plurality of electrically conductive pillars 64having a square-shaped lateral cross-section and arranged in a squaregrid. Arranging the plurality of electrically conductive pillars 22 in apatterned array may help the durability of stacked IC system 10 in oneor more regards. For example, the plurality of electrically conductivepillars 22 may help strengthen the interposer portion 20 therebyproviding added structural support for interposer layer 14. As anotherexample, the patterned array of electrically conductive pillars can helpimprove the reliability of system 10 by reducing mechanical stress onthe interposer layer 14 due to differential thermal expansion.Mechanical stress resulting from differential thermal expansion and CTEmismatches within a stacked IC system 10 may lead to physicaldeformation and causing premature failure modes. A patterned array ofelectrically conductive pillars 22 may help improve heat dissipation inIC system 10 and/or reduce CTE mismatches between adjacent IC layers 12and 16. As another example, a top surface of interposer portion 20 maybe planarized using chemical mechanical polishing (CMP). CMP may removedifferent types of material at different rates. By including a patternedarray of electrically conductive pillars 22 in interposer portion 20,more precise control of the CMP process for planarizing the plurality ofelectrically conductive pillars 22 and filler materials 24, 26 may beachieved.

The plurality of electrically conductive pillars 22 may be formed usingany one or more of a variety of techniques, including plating, filling,vapor deposition, or the like. Additionally, the plurality ofelectrically conductive pillars 22 may be formed from any electricallyconductive material including, for example, metals (e.g., copper (Cu),gold (Au), aluminum (Al), silver (Ag), tungsten (W), molybdenum (Mo), orthe like), alloys, resins, or the like. In some examples, the pluralityof electrically conductive pillars 22 may be formed from semiconductormaterial including, for example, doped silicon, doped polysilicon, orthe like.

Interposer portion 20 may also include an electrically non-conductivefiller material 24 that separates and substantially surrounds in the x-yplane each electrically conductive pillar of the plurality ofelectrically conductive pillars 22. Electrically non-conductive fillermaterial 24 may also provide structural support for interposer layer 14.In some examples, the gap space between adjacent pillars 22 may includeonly electrically non-conductive filler material 24. By surrounding anelectrically conductive pillar of the plurality of electricallyconductive pillars 22 with electrically non-conductive filler material24, the electrically conductive pillar of the plurality of electricallyconductive pillars 22 may be electrically isolated from otherelectrically conductive pillars 22 thereby preventing lateral electricalsignals (i.e., in the x-y direction) from being transmitted between theelectrically isolated electrically conductive pillar and the otherelectrically conductive pillars of the plurality of electricallyconductive pillars 22. Isolating electrically conductive pillars 22 mayallow for electrical signals to be transmitted between IC layers 12 and16 through the interposer layer 14 using a particular electricallyconductive pillar of the plurality of electrically conductive pillars22. Electrically non-conductive filler material 24 may include anyelectrically insulating material including for examplebenzocyclobutene-based polymers, silicon nitride, silicon dioxide,silicon oxycarbide, silicate glass, aluminum oxide, or the like.

In some examples, the interposer portion 20 may also include a second,electrically conductive filler material 26. In some examples, at leastsome of the plurality of electrically conductive pillars 22 may besubstantially surrounded with a relatively thin layer of the firstelectrically non-conductive filler material 24, and the remainder of thegap filled with the second, electrically conductive filler material 26.The relatively thin layer of non-conductive filler material 24 mayelectrically isolate the at least some of the plurality of electricallyconductive pillars 22 from the second, electrically conductive fillermaterial 26. In some examples, the second, electrically conductivefiller material 26 may electrically communicate with one or more of theplurality of electrically conductive pillars 22. Electrically conductivefiller material 26 may include any electrically conductive materialincluding, for example, metals (e.g., copper (Cu), gold (Au), aluminum(Al), silver (Ag), tungsten (W), molybdenum (Mo), or the like), alloys,resins, or the like. In some examples, the electrically conductivefiller material 26 may be formed from semiconductor material including,for example, doped silicon, doped polysilicon, or the like.

In some examples, the second filler material 26 may form one or moreelectrical webs 46 within the interposer portion 20 of the interposerlayer 14. Electrical webs 46 can be used, for example, to electricallyshield components within interposer layer 14 or for signal routing inthe horizontal direction within interposer portion 20, which may alsofacilitate signal routing between the layers 12, 14, or 16 in IC system10. In some examples, Electrical webs 46 may be formed out of conductivefiller material 26 deposited within the gaps between adjacentelectrically conductive pillars 22. In some examples electrical webs 46may be electrically isolated from the plurality of electricallyconductive pillars 22 by electrically non-conductive material 24. Forexample, in some examples, electrical web 46 may contain semiconductormaterial including, for example, doped silicon, doped polysilicon, orthe like, which is isolated from the plurality of electricallyconductive pillars 22 using electrically non-conductive filler material24. In some examples, electrical web 46 may be electrically connected toone or more electrically conductive pillars 22.

In some examples, the interposer layer 14 may contain one or moreelectrical loops 48. Such electrical loops 48 may be used toelectrically isolate and electromagnetically shield components (e.g., ICdie 28) contained in interposer layer 14. In some examples, electricalloops 48 form of a continuous loop used to encircle the interposer layer14 (e.g., about the perimeter of interposer layer 14), IC die 28, or thelike. The electrical loops 46 may take on any useful shape including,for example, a serpentine shape. In some examples, the electrical loops48 may comprise of the same electrically conductive material as theplurality or electrically conductive pillars 22 and may be formed usingthe same techniques discussed for forming the plurality of electricallyconductive pillars 22.

FIG. 2A is a top view conceptual and schematic diagram illustrating andexample of a lateral cross section (parallel to the x-y plane of FIG. 1)of an example interposer layer 58 that includes two IC dice 28A, 28Bencircled in the x-y plane by an interposer portion 60. Interposerportion 60 includes a plurality of electrically conductive pillars 64arranged, for example, in a grid-based patterned array. Eachelectrically conductive pillar of the plurality of electricallyconductive pillars 64 is separated from adjacent electrically conductivepillars of plurality of electrically conductive pillars 64 by a gapdistance (e.g. G_(x) and G_(y) shown in FIG. 2B) such that adjacentelectrically conductive pillars of the plurality of electricallyconductive pillars 64 do not directly contact one another. For example,FIG. 2B illustrates interposer portion 60 of interposer layer 58,including a plurality of electrically conductive pillars 64 arranged ina grid-based array where each electrically conductive pillar of theplurality of electrically conductive pillars 64 is separated from anadjacent electrically conductive pillar by a gap distance in the x-axisdirection (G_(x)), and a gap distance in the y-axis direction (G_(y)).In some examples, the gap distance between adjacent electricallyconductive pillars 64 may be on the order of about 10 μm.

While it is not necessary, in some examples, each gap distance G_(x) inthe x-axis direction between subsequent pillars 64 may be substantiallyequal (e.g., equal or nearly equal) throughout inter poser portion 60and each gap distance G_(y) in the y-axis direction between subsequentpillars 64 may be substantially equal (e.g., equal or nearly equal)throughout inter poser portion 60. In some examples, the gap distancesin the x-axis direction (G_(x)) and the gap distances in the y-axisdirection (G_(y)) may be substantially equal to each other (e.g., G_(x)equals or nearly equals G_(y)). In this way, in some examples, the gapdistance between adjacent pillars of the plurality of electricallyconductive pillars 64 is substantially uniform, which can facilitatebackfill of filler material 62 and 72 into the gaps between adjacentpillars of the plurality of electrically conductive pillars 64 duringformation of interposer portion 60. Additionally or alternatively, insome examples, a uniform gap distance (G_(x) and G_(y)) may reducemechanical stress on the IC system (e.g., IC system 10 of FIG. 1)because any dimensional changes associated with thermal expansion orcontraction of interposer portion 60 may be substantially uniform inboth the x and y directions. In some examples, as described above, byincluding substantially equal gap distances (G_(x) and G_(y)), moreprecise control of a CMP process for planarizing the plurality ofelectrically conductive pillars 64 and filler materials 62 and 72 may beachieved.

In the example shown in FIG. 2A, IC die 28A and 28B are substantiallyencircled (e.g., entirely or nearly entirely encircled) by interposerportion 60 in the x-y plane (orthogonal x-, y-, and z-axes are shown inFIG. 2A for purposes of illustration only). With this configuration,when IC layers 12 and 16 are positioned above and below (with respect tothe z-axis) interposer layer 58 IC dice 28A and 28B are substantiallyentirely encapsulated (e.g., entirely encapsulated or nearly entirelyencapsulated) within IC system 10. IC dice 28A and 28B thus may not beexposed, such that access to IC dice 28A and 28B may be hindered. Inthis way, adjacent IC layers 12, 16 and interposer 60 may define asecure boundary for IC dice 28A and 28B that helps prevent access to ICdice 28A and 28B in some examples.

In other configurations, however, IC dice 28A and 28B may only bepartially encapsulated within IC system 10. For example, at least one ofIC dice 28A or 28B may be positioned proximate to an outer perimeter ofinterposer layer 58 such that, when IC layers 12 and 16 are positionedabove and below (with respect to the z-axis) interposer layer 58, atleast a portion of the at least one IC die 28A or 28B is exposed at theperimeter. In these examples, IC layers 12 and 16 may still define asecure boundary for IC dice 28A and 28B because the boundary may stillbe more secure than if interposer portion 20 was not adjacent to IC die28A and 28B.

The example interposer layer 58 in FIG. 2A also includes a first fillermaterial 62, which may include an electrically non-conductive material.In some examples, first filler material 62 may be similar to orsubstantially the same as electrically non-conductive material 24illustrated and described in FIG. 1. First filler material 62 includingan electrically non-conductive material may substantially surround(e.g., surround or nearly surround) IC dice 28A and 28B and some of theplurality of electrically conductive pillars 64 within the interposerlayer 58. In this way, first filler material 62 including anelectrically non-conductive material may provide electrical isolationfor at least some of the plurality of electrically conductive pillars 64and IC die 28A and 28B as well as structural support for interposerlayer 58.

In some examples, interposer portion 60 also may include an electricallyconductive material deposited within interposer portion 60 to create oneor more electrically conductive loops 70A-70D within interposer layer58. The electrical loops may include, for example, a continuouselectrically conductive loop 70A that encircles interposer layer 58 acontinuous electrically conductive loop 70B that encircles IC die 28A, acontinuous electrically conductive loop 70C that encircles IC die 28B,and a continuous electrically conductive loop 70D that encircleselectrical web 74B. In some examples, at least one of electrical loops70A-70D may extend throughout the thickness of interposer layer 58(i.e., in the z-direction) such that the at least one of electricallyconductive loops 70A-70D defines a ribbon. Further, at least one of theelectrically conductive loops 70A-70D may be electrically connected to arespective electrical contact 42 of one of the adjacent IC layer (e.g.,IC layer 12 or 16 of FIG. 1), which may serve to electrically ground therespective electrically conductive loop.

In some examples, electrically conductive loops 70A-70D may electricallyisolate and electromagnetically shield (e.g., from electromagneticinterference) the respective components that respective loops ofelectrically conductive loops 70A-70D encircle. In some examples, theelectrically conductive loop, e.g., loop 70D, may serve to electricallyisolate portions interposer portion 60 and physically break electricalweb 74, thereby creating multiple electrical webs, e.g., webs 74A and74B, within interposer portion 60.

Electrically conductive loops 70A-70D may take on any shape. In someexamples, electrically conductive loops may be circular, rectangular, orpolygonal in shape, e.g., loop 70D. In some examples, electricallyconductive loops may define a substantially serpentine pattern, e.g.,loops 70A-70C, which may be useful in reducing mechanical stress oninterposer portion 60 associated with differential thermal expansion. Insome examples, the electrically conductive loops 70A-70D may be formedusing the same techniques, materials, and at same time that theplurality of electrically conductive pillars 64 are formed. In otherexamples, the electrically conductive material used to form theelectrically conductive loops 70A-70D may be a different material thanthe plurality of electrically conductive pillars 64.

In some examples, the second, electrically conductive filler material 72may be deposited so that it forms one or more electrical webs 74A, 74Bwithin interposer portion 60. For example, in some examples,electrically conductive filler material 72 may be deposited within thegaps (e.g., G_(x) and G_(y)) between adjacent conductive pillars 64 sothat electrically conductive filler material 72 forms a connective web,e.g., 74A, within the interposer portion 60.

As shown in FIG. 2A, electrical webs 74 may be electrically insulatedfrom the plurality of electrically conductive pillars 64 by first fillermaterial 62 including an electrically non-conductive material.Electrical webs 74 allow electrical signals to be transmitted laterally,i.e., in the x- and y-axis directions, within interposer layer 58. Insome examples, electrical webs 74 may be connected to one or more of theplurality of electrically conductive pillars 64 allowing electricalsignals to be transmitted both laterally and vertically (parallel to thez-axis direction) through interposer layer 58 and between adjacent IClayers (e.g. IC layers 12 and 16 of FIG. 1).

In some examples, electrical webs 74 may be electrically isolated fromone or more of the adjacent IC layers (e.g., IC layer 12 and 16 fromFIG. 1). For example, after the plurality of electrically conductivepillars 64 are formed, interposer portion 60 may be backfilled with theelectrically non-conductive filler material 62 to form a thin layer ofelectrically insulating material around the electrically conductivepillars 64 and on the surface of the lower IC layer (e.g., IC layer 16from FIG. 1). The remaining gaps between adjacent electricallyconductive pillars 64, may then be backfilled with second fillermaterial 72 to establish electrical webs 74.

In other examples, electrical webs 74 may extend substantially throughthe thickness (i.e., the distance in the z-axis direction of FIG. 2A) ofinterposer portion 60 and contact adjacent IC layers 12 and 16. In suchconfigurations, conductive material 72 used to form electrical webs 74may be formed at the same time the plurality of electrically conductivepillars 64 are formed using the same processes. In some examples,electrical web 74 may be directly electrically connected to adjacent IClayers (e.g. IC layers 12 and 16 of FIG. 1).

In some examples, more than one electrical web, e.g., electrical webs74A and 74B, may be formed within interposer portion 60. Establishingmultiple electrical webs 74 within interposer layer 58 may help createadditional redundancy features within the IC system. For example,redundant electrical signals may be routed though different areas ofinterposer portion 60 using the electrically conductive pillars 64,where each area is defined by a different electrical web 74. In thisway, if any signal faults or shorts occur within a specific area (e.g.,electrically conductive pillar 64 erroneously contacting electrical web74A), alternative electrical pathways still exist for routing andtransmitting the signal.

In some examples, electrical webs 74A and 74B may be separated from oneanother by the use of non-conductive filler material 62 and theinclusion of one or more electrical loops, e.g., electrical loop 70D. Inthis way, the non-conductive filler material 62 electrically isolateselectrical webs 74 from one another while the electrical loop 70D helpsestablish an added layer of protection and electrical isolation betweenneighboring electrical webs 74A and 74B. In some examples (not shown inFIG. 2A.), electrical webs 74A and 74B may be electrically isolated fromone another by only non-conductive filler material 62 without the use ofelectrical loop 70D.

Returning to FIG. 1, while IC system 10 includes three layers(interposer layer 14, and IC layers 12 and 16), systems in accordancewith this disclosure may include multiple interposer layers, multiple IClayers, or both. For example, an IC system may include a plurality ofinterposer layers, each including at least one IC die, with an IC layerpositioned in between each interposer layer creating a stacked IC systemof alternating IC layers and interposer layers. As yet another example,IC layers 12 and 16 (e.g., layers of the stack that do not include aninterposer portion) may comprise multiple sections, instead of being asingle, continuous element (as shown in the figures described herein).In some of these examples, voids may exist between the multiple sectionsand a suitable fill material may be used to fill the voids in order toform a planar surface for stacking of the layers and to ensureelectrical connections from an interposer layer to other adjacentlayers. In some examples, additional layers may be added to stacked ICsystem 10 including one or more metals layers, one or more shieldinglayers, or both.

As described above, interposer portion 20 and IC layers 12 and 16 mayphysically secure (e.g., substantially encapsulate) IC die 28. Othertechniques may be used in addition to at least partially secure aboundary defined by IC layers 12 and 16 and interposer portion 20 toprotect IC system 10 from reverse engineering. For example, if IC 28includes a memory die, the contents of the memory may be encrypted. Theat least partially secure physical boundary defined by IC layers 12 and16 and interposer portion 20 may be an additional layer of securityagainst unauthorized access to the memory contents.

In some examples, stacked IC system 10 may be incorporated into a largersystem using any suitable technique. For example, stacked IC system 10may be incorporated into an IC package, which may provide protection ofstacked IC system 10 contained therein against environmentalcontaminants. In addition, the IC package may provide a thermallyconductive pathway for dissipating heat generated by stacked IC system10 enclosed therein. In some examples, the IC packages may alsofacilitate mounting of stacked IC system 10 onto a printed board.

In some examples, stacked IC system 10 may be housed in an IC packageconfigured to provide a hermetic housing, which may be useful in someapplications to help protect stacked IC system 10 from environmentalcontaminants. Stacked IC system 10 may also be electrically coupled to aprinted board or electrically conductive bond pads in the IC package viaany suitable technique, such as via solder balls, conductive pins,solder columns, and the like. In other examples, stacked IC system 10may be directly mechanically and electrically connected to a printedboard, without being disposed in an IC package.

Stacked IC system 10 may be packaged in any suitable manner using anysuitable packaging technique known in the art. For example, stacked ICsystem 10 may be packaged in a package including an electricallyconductive material such as aluminum silicon carbide (AlSiC), coppertungsten (CuW), copper molybdenum (CuMo), a nickel cobalt ferrous alloy(e.g., an alloy provided under the trademark Kovar®, made available byCarpenter Technology Corporation of Reading Pennsylvania), or the like.As another example, stacked IC system 10 may be packaged in a packageincluding an electrically insulating ceramic material, such as aluminumoxide, aluminum nitride (AlN), beryllium oxide (BeO), and siliconcarbide (SiC). In some examples, stacked IC system 10 may be packaged ina package including materials that are thermally conductive or include apolymeric material, such as a polytetrafluoroethylene (PTFE)/ceramicbased laminate (e.g., Rogers RO2800 laminate, which is made commerciallyavailable by Rogers Corporation of Rogers, Conn.) or fluoropolymermaterials (e.g., fluoropolymers made commercially available by W. L.Gore and Associates of Newark, Del.), FR-4, BT-Epoxy, or polyimide.

Stacked IC system 10 may be made using any number of techniques. FIG. 3is a flow diagram illustrating an example technique that may be used toform stacked IC system of the disclosure, such as, for example, stackedIC system 10 of FIG. 1. While the technique shown in FIG. 3 is describedwith respect to stacked IC system 10, in other examples, the techniquemay be used to form other stacked IC systems that include differentconfigurations of interposer portions or multiple IC dice.

The technique illustrated in FIG. 3 includes mounting IC die 28 to partof a top surface of IC layer 16 such that IC die 28 and IC layer 16 arestacked in a substantially z-axis direction and electrically connectedto each another (82). As described above, IC die 28 and IC layer 16 maybe electrically coupled using any one or more of a variety oftechniques, including wire bonding, flip-chip bonding, direct metalbonding, thermal compression, oxide bonding, or the like. For example,IC layer 16 includes a plurality of electrical contacts 38 positioned onthe surface that correspond to and electrically communicate withelectrical contacts 36 of IC die 28.

The technique of FIG. 3 also includes forming interposer portion 20 onpart of the top surface of IC layer 16 and adjacent to IC die 28 (84).Interposer portion 20 may include a plurality of electrically conductivepillars 22 extending substantially parallel to the z-axis direction,where the plurality of electrically conductive pillars 22 forms apatterned array in an x-y plane on the surface of IC layer 16. Asdescribed above, the plurality of electrically conductive pillars 22 maybe formed using any one or more of a variety of techniques, includingplating, filling, vapor deposition, etching, or the like, until theplurality of electrically conductive pillars 22 extend substantiallyparallel to the z-axis direction to a sufficient height (e.g.,substantially equal to the height of IC die 28 or slightly greater thanthe height of IC die 28).

In some examples, the plurality of electrically conductive pillars 22may be formed in a plurality of processing steps which results in theplurality of electrically conductive pillars 22 being formed directly onelectrical contacts 42. For example, the exposed surface of IC layer 16(around IC die 28) may be passivated with a dielectric, such as SiN,then patterned and etched to define a plurality of vias extendingthrough the dielectric to electrical contacts 42. An electricallyconductive seed layer (e.g., Cu or Ag) then may be deposited atlocations corresponding to the plurality of electrically conductivepillars 22 as a base for the plurality of electrically conductivepillars 22. The plurality of electrically conductive pillars 22 then maybe grown upward in the z-axis direction using for example,electroplating, until the pillars reach a desired height, such as theheight of IC die 28 or a height slightly greater than the height of ICdie 28. In some examples, the plurality or electrically conductivepillars 22 form a patterned array defining gaps between each of thepillars.

In some examples, forming interposer portion 20 including a plurality ofelectrically conductive pillars 22 (84) may also include backfillinggaps between adjacent ones of the plurality of electrically conductivepillars 22 with a filler material (e.g., electrically non-conductivematerial 24, electrically conductive material 26, or both) so that thefiller material substantially encircles each of the plurality ofelectrically conducting pillars 22 in the x-y plane. The backfillingprocess may be accomplished by, for example, depositing the fillermaterial using chemical vapor deposition (CVD). As described above, thefiller material may include an electrically non-conductive material 24used to electrically isolate certain electrically conductive pillarsfrom the remainder of the plurality of electrically conductive pillars22, may include an electrically conductive material 26 that may be usedto create an electrical web 46 within the interposer portion 20 or toelectrically connect two or more electrically conductive pillars fromthe plurality of electrically conductive pillars 22, or both. In someexamples, the backfilling process can be done in multiple steps,selectively depositing either electrically non-conductive material 24 orelectrically conductive material 26, such that electrical webs 46 may becreated within interposer portion 20 of interposer layer 14.

In some examples, electrical loops 48 formed within interposer layer 14using an electrically conductive material. In some examples, theelectrical loops 48 may be formed using the same techniques and at thesame time that the plurality of electrically conductive pillars 22 areformed. In some examples, the electrical loops 48 may be formed afterthe plurality of electrically conductive pillars 22 are formed by, forexample, backfilling the space between adjacent electrically conductivepillars 22 with an electrically conductive filler, e.g, filler material26, so that multiple electrically conductive pillars 22 are connected toestablish the electrical loop 48. The electrical loops 48 may encirclecomponents in interposer layer 14 (e.g., IC die 28) to establish anelectrical loop (e.g., a serpentine loop) that may aid in electricallyshielding the encircled component.

In other examples, forming interposer portion 20 including a pluralityof electrically conductive pillars 22 (84) may include first forming oneor more layers of filler material (e.g., electrically non-conductivematerial 24 on the surface of IC layer 16 to reach a desired height(e.g., the height of IC die 28 or a height slightly greater than theheight of IC die 28). Each layer of filler material may be formed usingany suitable process, including, for example, chemical vapor deposition(CVD), physical vapor deposition (PVD), or the like. Once a layer of thefiller material has been formed, apertures or vias that correspond tothe plurality of electrically conductive pillars 22 can be patterned andetched into the filler material using, for example, an etchant thatselectively etches the filler material but does not etch the underlyingmaterial at the surface of IC layer 16. For example, the patternedetching may be conducted using buffered hydrofluoric acid (BHF; amixture of a buffering agent such as ammonium fluoride (NH4F) andhydrofluoric acid (HF)) or dry plasma etching techniques. After theapertures or vias have been etched, the vias or apertures can be filledwith a conductive material (e.g., Cu or Ag) to form the plurality orelectrically conductive pillars 22. The conductive material may bedeposited using any suitable process, including, for example, chemicalvapor deposition (CVD), electroplating, or the like. The resultingstructure then may be planarized using, for example, CMP.

In some examples, the electrical webs (e.g., web 46 of FIG. 1 or webs 74of FIG. 2) and electrical loops (e.g., loop 48 of FIG. 1 or loops70A-70D of FIG. 2) may be formed in a similar method to the plurality ofelectrically conductive pillars 22. For example, after a layer ofnon-conductive material 24 is formed, the layer can be pattern etched tocreate both apertures and/or trenches that correspond to the electricalweb 46, and electrical loop 48. The apertures and trenches then may bebackfilled with electrically conductive material (e.g. electricallyconductive material 26). The patterned etching may be done in a singlestage or multiple stages with or without backfilling between each stage.For example, a layer of electrically non-conductive material 24 may beetched first to form the trenches and backfilled with electricallyconductive material 26. After the trenches are backfilled, the surfacecan be remasked and etched to form the apertures for the plurality ofelectrically conductive pillars 22 and electrical loop 48. In someexamples, the electrically conductive material that makes up theplurality of electrically conductive pillars 22 and the conductivefiller material 26 is the same, and, in other examples, the material maybe different.

During the formation of the interposer portion 20 (84), one or more ofthe plurality of electrically conductive pillars 22 may be electricallycoupled with IC layer 16. For example, electrically conductive vias 32present in IC layer 16 may be electrically connected to the plurality ofelectrically conductive pillars 22 of the interposer portion 20 by wayof electrical contacts 42 positioned along the surface of IC layer 16and metal bonded to the plurality of electrically conductive pillars 22.In this way, in some examples, IC die 28 may be in electricalcommunication with the plurality of electrically conductive pillars 22by way of traces 34 and vias 32, 40 present in IC layer 16.

The technique illustrated in FIG. 3 also includes stacking a second IClayer 12 on interposer portion 20 and IC die 28 (86). During stacking,the second IC layer 12 may be coupled to interposer portion 20electrically, mechanically, or both, using any suitable technique,including adhesive bonding, metal bonding, solder bonding, or the like.For example, respective electrically conductive vias 32 present in IClayer 12 may be electrically connected to respective ones of theplurality of electrically conductive pillars 22 of interposer portion 20by way of electrical contacts 42 positioned along the surface of IClayer 12, adjacent to interposer layer 14 and metal bonded to theplurality of electrically conductive pillars 22. Also as describedabove, in some examples, IC die 28 may be bonded to IC layer 12 using anadhesive bond 50 for added mechanical security.

In some examples, the technique illustrated in FIG. 3 may also includeone or more planarization steps. For example, after interposer portion20 is formed, a surface opposite the interface between IC layer 16 andinterposer portion 20 may be planarized using for example, CMP. IC layer12 can then be stacked on the planarized surface and configured toelectrically communicate with the plurality of electrically conductivepillars 22 (86).

Various examples have been described. These and other examples arewithin the scope of the following claims.

1. A system comprising: a first integrated circuit layer comprising afirst plurality of interconnect elements; a second integrated circuitlayer comprising a second plurality of interconnect elements; and aninterposer layer between the first and second integrated circuit layers,wherein the first and second integrated circuit layers and theinterposer layer are stacked in a z-axis direction, and wherein theinterposer layer comprises: an interposer portion comprising a fillermaterial and a plurality of electrically conductive pillars extending inthe z-axis direction, wherein the plurality of electrically conductivepillars form a patterned array in an x-y plane substantially normal tothe z-axis direction, wherein each electrically conductive pillar of theplurality of electrically conductive pillars is substantially encircledin the x-y plane by the filler material, wherein at least oneelectrically conductive pillar of the plurality of electricallyconductive pillars is configured to electrically communicate with atleast one interconnect element of the first plurality of interconnectelements and at least one interconnect element of the second pluralityof interconnect elements, wherein the filler material comprises anelectrically conductive material that forms at least one electrical webwithin the x-y plane of the interposer portion interposer portion; and afirst integrated circuit die adjacent to the interposer portion andbetween the first and second integrated circuit layers.
 2. The system ofclaim 1, wherein the interposer portion substantially encircles thefirst integrated circuit die in the x-y plane, and wherein the patternedarray of the plurality of electrically conductive pillars substantiallysurrounds the first integrated circuit die.
 3. The system of claim 1,wherein the patterned array of the plurality of electrically conductivepillars comprises a grid having an x-separation distance betweenadjacent electrically conductive pillars and a y-separation distancebetween adjacent electrically conductive pillars, and wherein thex-separation distance and the y-separation distance are about 10 μm. 4.The system of claim 1, wherein the filler material comprises at leastone electrically non-conductive material comprising at least one ofbenzocyclobutene-based polymers, silicon dioxide, silicon nitride, oraluminum oxide.
 5. (canceled)
 6. The system of claim 1, wherein theelectrically conductive material comprises a semiconductor material. 7.The system of claim 1, wherein the interposer portion further comprisesan electrical loop that encircles the first integrated circuit die inthe x-y plane of the interposer portion.
 8. The system of claim 7,wherein the electrical loop comprises a serpentine shape.
 9. The systemof claim 1, wherein the plurality of electrically conductive pillarshave a substantially similar sized lateral cross-sectional dimension.10. The system of claim 9, the lateral cross-sectional dimension of theplurality of electrically conductive pillars is about 30 μm.
 11. Thesystem of claim 1, wherein the plurality of electrically conductivepillars comprises at least one of semiconductor material, copper, orgold.
 12. The system of claim 2, wherein: the interposer layer furthercomprises a second integrated circuit die adjacent to the interposerportion and between the first and second integrated circuit layers; thesecond integrated circuit die is electrically connected to at least oneof the first plurality of interconnect elements, the interposer portionsubstantially encircles the second integrated circuit die in the x-yplane; and the patterned array of the plurality of electricallyconductive pillars substantially surrounds the second integrated circuitdie.
 13. A method comprising: mounting a first integrated circuit die ona top surface of a first integrated circuit layer, wherein the firstintegrated circuit die and first integrated circuit layer are stacked ina z-axis direction, and wherein the first integrated circuitelectrically communicates with the first integrated circuit layer;forming an interposer portion on an exposed part of the top surface ofthe first integrated circuit layer adjacent to the first integratedcircuit die, wherein the interposer portion comprises a plurality ofelectrically conductive pillars extending in the z-axis direction,wherein the plurality of electrically conductive pillars form apatterned array in an x-y plane substantially normal to the z-axisdirection, wherein each electrically conductive pillar of the pluralityof electrically conductive pillars is substantially encircled in the x-yplane by a filler material, wherein the filler material comprises anelectrically conductive material that forms at least one electrical webwithin the x-y plane of the interposer portion interposer portion, andwherein at least one of the plurality of electrically conductive pillarsis configured to electrically communicate with the first integratedcircuit layer; and stacking a second integrated circuit layer on theinterposer portion, wherein the first and second integrated circuitlayers are substantially parallel to each other and the first integratedcircuit is between the first and second integrated circuit layers. 14.The method of claim 13, wherein the interposer portion substantiallyencircles the first integrated circuit die, and wherein the patternedarray of the plurality of electrically conductive pillars substantiallysurrounds the first integrated circuit die.
 15. The method of claim 13,wherein the filler material comprises an electrically non-conductivematerial comprising at least one of benzocyclobutene-based polymers,silicon dioxide, silicon nitride, or aluminum oxide.
 16. (canceled) 17.The method of claim 15, wherein forming an interposer portion furthercomprises forming the at least one electrical loop that encircles thefirst integrated circuit die in the x-y plane.
 18. The method of claim17, wherein the electrical loop comprises a serpentine shape.
 19. Themethod of claim 17, wherein the electrical loop and the plurality ofelectrically conductive pillars are formed at the same time.
 20. Themethod of claim 13, wherein the plurality of electrically conductivepillars have a substantially similar sized lateral cross-sectionaldimension, wherein the patterned array of the plurality of electricallyconductive pillars comprises a grid having an x-separation distancebetween adjacent electrically conductive pillars and a y-separationdistance between adjacent electrically conductive pillars, wherein thex-separation distance and the y-separation distance are substantiallyuniform throughout the patterned array of the plurality of electricallyconductive pillars, and wherein the x-separation distance and they-separation distance are substantially equal.